GAS Supply System
GC (Gas Cabinet)
This device stably supplies high-pressure special gas used in semiconductor processes. Since this equipment is manufactured in accordance with safety standards including SEMI standards and CE mark, various safety devices are installed to detect gas leaks and explosions in advance. It is also capable of automatic operation through PLC control.
| Items | Specifications |
|---|---|
| Dimension | 900(W) x 660(D) x 2030(H) |
| Power | 208 VAC, 15A, 1 Phase |
| Supply Line | 1~2 Stick |
| Change Concept | PN2 Purge |
| Weight detection | Weight Scale |
| Cylinder volume | Below 54L Cylinder |
| Flow Rate | 30SLPM (Max.Flow Rate@N2 Gas) |
| Supply pressure | 0.1~0.9MPa |
LDS (Liquid Delivery System)
It is a device for stable supply for processes that use ultra-high purity liquid precursors including semiconductors, displays, and solar panels. It is capable of detecting liquid leaks and gas, is equipped with various safety devices to safely respond to emergencies, and is capable of automatic operation through PLC control.
| Items | Specifications |
|---|---|
| Dimension | 650(W) x 846(D) x 2000(H) |
| Power | 208 VAC, 10A, 1 Phase |
| Supply Line | 2~4 Stick |
| Change Concept | PN2 Purge |
| Weight detection | Weight Scale, Ultrasonic Sensor |
| Cylinder volume | Recycle Canistger(2~38L), Process Canister(14L) |
ARS (Auto Refill System)
It is a device for stable supply for processes that use ultra-high purity liquid precursors including semiconductors, displays, and solar panels. It is capable of detecting liquid leaks and gas, is equipped with various safety devices to safely respond to emergencies, and is capable of automatic operation through PLC control.
| Items | Specifications |
|---|---|
| Dimension | 900(W) x 710(D) x 2140(H) |
| Power | 208 VAC, 15A, 1 Phase |
| Supply Line | 4 Stick |
| Change Concept | PN2 & Solvent Purge |
| Weight detection | Weight Scale, Ultrasonic Sensor |
| Cylinder volume | Recycle Canistger(2~38L) Process Canister(14L) Solvent Canister(2~38L) Waste Canister(2~38L) |
Vapor System
This device stably supplies high-pressure special gas used in semiconductor processes. Since this equipment is manufactured in accordance with safety standards including SEMI standards and CE mark, various safety devices are installed to detect gas leaks and explosions in advance. It is also capable of automatic operation through PLC control.
| Items | Specifications |
|---|---|
| Dimension | 900(W) x 630(D) x 2140(H) |
| Power | 208 VAC, 10A, 1 Phase |
| Supply Line | 2~3 Stick |
| Weight detection | Weight Scale, Ultrasonic Sensor |
| Canister volume | Process Canister(10L) Waste Canister(19L) |