It supplies high-pressure charged toxic, corrosive, combustible, and inert gas used in semiconductor manufacturing processes to MAIN facilities in a safe, constant pressure and constant amount, prevents gas from spreading in case of explosion, and automatically shuts off/exhaust gas in case of emergency.
Designed to supply and adjust the gas flow to the required pressure for each semiconduction facility with a safety control system blocking and exhausting the Gas automatically in an emergency
System Specification
- Applied : Specific High-pressure Gas (toxic, corrosive, combustible and inert gas)
- Control : Fluid Flow Control using pneumatic valve
- Flow Rate : Customized
- Pressure : Customized
